CMC Unheated Capacitance Manometers

Minimize drift and thermal effects. Maximize vacuum process results.

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.

The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.

The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.

 

Features

  • Available for process ranges from 0.10 Torr to 1000 Torr
  • Multiple accuracy levels available
  • Patented Mark IV sensor
  • Digital architecture enables operation over a wide dynamic range with extremely good accuracy
  • Dual-zone temperature control improves measurement stability and repeatability
  • Multi-decade digital calibration provides superior window of known accuracy
  • Intelli-touch zero adjustment
  • Independent & easily accessible diagnostic service port
  • DeviceNet® and analog communication options